Micromachining: An overview (Part I)

Abstract

This article gives classification of micromanufacturing in general and micromachining processes in particular. For different micromachining processes, one can have different kinds of operations through which different features, shapes, accuracy, precision, and dimensions can be achieved. This article as Part I reports an overview of only three processes as diamond turn machining (a class of traditional micromachining processes), electrochemical micromachining, and focused-ion-beam micromachining (a class of advanced micromachining processes). About all these three processes, a brief introduction to the mechanisms of material removal is reported followed by the new developments in each process which are discussed independently. In various sections, some areas where research work needs to be done are identified and very briefly discussed.