Heat transfer in micro devices packaged in partial vacuum

Abstract

The influence of rarefaction effects on technical processes is studied numerically for a heat transfer problem in a rarefied gas, a box with bottom heated plate. Solutions obtained from several macroscopic models, in particular the classical Navier-Stokes-Fourier equations with jump and slip boundary conditions, and the regularized 13 moment (R13) equations [Struchtrup & Torrilhon, Phys. Fluids 15, 2003] are compared. The R13 results show significant flow patterns which are not present in the classical hydrodynamic description.