A Novel Photoplastic Piezoelectric Nanocomposite for MEMS Applications
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Date
2012-04
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Publisher
IEEE
Abstract
This letter reports a photoplastic (SU-8) piezoelectric (ZnO) nanocomposite route for realization of simple and low-cost piezoelectric microelectromechanical systems (MEMS). Integrating the ZnO nanoparticles into a photosensitive SU-8 polymer matrix not only retains the highly desired piezoelectric properties of ZnO but also combines the photopatternability and the optical transparency of the SU-8 polymer. These two aspects, therefore, lead to exciting MEMS applications with simple photolithography-based microfabrication. This approach opens up many new applications in the field of both sensor and energy harvesting
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Keywords
EEE, Microelectromechanical systems (MEMS), Nanocomposites, Piezoelectrics, SU-8 polymer