Piezoresistive SU-8 Cantilever With Fe(III)Porphyrin Coating for CO Sensing
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Date
2012-07
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Publisher
IEEE
Abstract
Carbon monoxide detection is required for various healthcare, environmental, and engineering applications. In this paper, 5,10,15,20-tetra (4,5-dimethoxyphenyl)-21H,23H-porphyrin iron(III) chloride (Fe(III)porphyrin) coated on a piezoresistive SU-8 microcantilever has been used as a CO sensor. Rapid detection of CO down to 2 ppm has been observed with aforementioned sensors. Cantilevers without Fe(III)porphyrin have not responded to CO exposure. Fe(III)porphyrin-coated cantilever selectivity toward CO has been analyzed by measuring the sensor response to various gases such as N 2 , CO 2 , O 2 , ethanolamine, N 2 O, and moisture. The sensor has exhibited a fast response and recovery times and is fully recoverable after repeated exposures.
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Keywords
EEE, Cantilevers, Carbon monoxide, Iron porphyrin, Piezoresistance, Sensors