Design and simulation of piezoelectric MEMS logic gates

Abstract

In this article, MEMS-based logic gates such as OR, AND, NOT, NOR, and NAND gates with functionalities similar to the electronic digital devices are designed and simulated. The key feature of these logic devices is that the mechanical cantilever structure of the basic piezo-actuator is adapted to operate like a particular digital logic gate based on the digital inputs. Complete analytical modelling for a single piezo-actuator with a correlation between its out-of-plane tip deflection with applied voltage is obtained. The proposed digital logic devices are further validated through simulation using the MEMS CAD tool CoventorWare.