Local piezoelectric response of ZnO nanoparticles embedded in a photosensitive polymer
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Date
2011-12
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Publisher
Wiley
Abstract
Local piezoelectric properties of ZnO nanoparticles (NPs) embedded in a photo-epoxy polymer are investigated by piezoresponse force microscopy (PFM). Integrating ZnO NPs into a photosensitive SU-8 polymer matrix not only retains the highly desired piezoelectric properties of the ZnO, but also preserves photosensitivity and optical transparency of the SU-8 polymer. These results have strong implications for simple photolithography based low-cost fabrication of piezoelectric microelectromechanicalsystems (MEMS) and nanoelectromechanicalsystems (NEMS) in both sensing and energy harvesting applications
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Keywords
EEE, Photosensitive polymer, ZnO nanoparticles, Piezoelectrics