MEMS based polymeric H2 S gas sensor for agricultural applications

Abstract

In this work, we demonstrate the development of a Microlectromechanical system (MEMS) based, cleanroom free fabricated, piezoresistive hydrogen sulfide (H 2 S) gas sensor using a flexible polyethylene terephthalate (PET) substrate. This relatively cheap, simple to use, calibration-free sensor is highly sensitive, selective and operates at ambient conditions of temperature and humidity. This gas sensor would be ideal for agricultural applications where farmers are at risk for exposure to toxic gases, particularly H 2 S exposure in manure pits and livestock work.