Electron beam deposited thin titanium films and its thermal oxidation to form rutile TiO2 thin films

Abstract

Smooth and homogeneous titanium (Ti) thin films are formed on quartz substrate using a vacuum assisted electron beam evaporation technique. Afterwards, controlled thermal oxidation of these Ti films are performed to grow a uniform titanium dioxide (TiO2) layer. Structural, morphological, chemical and optical properties of these metal and oxide layers have been investigated using various surface characterization techniques such as x-ray diffraction (XRD), scanning electron microscopy (SEM), Raman spectroscopy and UV-Vis spectroscopy. Formation of rutile TiO2 phase is confirmed from the XRD and Raman spectroscopy, after thermal oxidation above 400°C. SEM imaging suggests the formation of a smooth and homogeneous Ti as well as TiO2 layers which appear with a nanometer scale granular surface morphology. All findings are explained in terms of surface thermodynamics and chemical reactivity.