Fabrication and characterization of novel polymer composite microcantilever sensors for explosive detection

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dc.contributor.authorRao, V. Ramgopal
dc.date.accessioned2023-11-03T04:24:29Z
dc.date.available2023-11-03T04:24:29Z
dc.date.issued2010-01
dc.description.abstractIn this paper, we report the development of a SU-8 based novel polymer composite microcantilever sensor designed for surface stress measurements. Nanoindentation study was carried out for measuring the Young's modulus of the polymer composite. A low cost process, optimized for fabrication of composite SU8 microcantilevers with thickness as small as 3 ¿m is developed and characterized as part of this work. Further, this paper also demonstrates the application of this polymer composite cantilever for explosive detection with the appropriate surface coatings carried out on the polymer surface.en_US
dc.identifier.urihttps://ieeexplore.ieee.org/document/5442340
dc.identifier.urihttp://dspace.bits-pilani.ac.in:8080/xmlui/handle/123456789/12834
dc.language.isoenen_US
dc.publisherIEEEen_US
dc.subjectEEEen_US
dc.subjectFabricationen_US
dc.subjectSensor phenomena and characterizationen_US
dc.subjectExplosivesen_US
dc.subjectChemical and biological sensorsen_US
dc.titleFabrication and characterization of novel polymer composite microcantilever sensors for explosive detectionen_US
dc.typeArticleen_US

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