Electromagnetic modeling and parameter extraction of RF-MEMS switch
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Date
2013-11
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Publisher
Springer
Abstract
The electromagnetic model of RF-MEMS switch is used to accurately determine the electrical parameters (resistance, inductance and capacitance of MEMS bridge) from S-parameter measurement. It is observed that non-uniform serpentine spring based inductively tuned switch exhibit isolation of more than 30 dB for multiple resonant frequencies ranging from Ka band to Ku band. Comparison between computed and simulated results shows the close agreement which gives the validity of proposed study.
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Keywords
EEE, RF-MEMS, MEMS bridge, Electromagnetic model