Analytical Modeling for Spring Constant of Non-Uniform Serpentine Radio Frequency-Micro Electro Mechanical System Switch
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Date
2013-12
Authors
Gupta, Navneet
Journal Title
Journal ISSN
Volume Title
Publisher
Ingenta
Abstract
This paper presents an improved design of radio frequency (RF) microelectromechanical system (MEMS) switch having non-uniform serpentine flexure structure. An analytical modeling for spring constant of non-uniform serpentine flexure is obtained using small displacement theory. The spring constant computed analytically is compared with Finite Element Method (FEM). It is observed that in comparison to the uniform serpentine flexure reported so far, the proposed design shows a considerable decrease in spring constant
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Keywords
EEE, FEM, RF MEMS SWITCH, Serpentine flexure design, Spring constant