Sensitivity to Over-Etching of Improved V-Shaped Microcantilever 856

Abstract

In this paper we have analyzed the sensitivity to over-etching of our recently proposed improved V-Shaped microcantilever. For V-shaped microcantilever, the final length is very sensitive to over-etching because of the sharp corner at the free end of the cantilever. It has been observed that for different values of over-etching the improved V-shape microcantilever tip is more robust compared to the linear counterpart.