Sensitivity to Over-Etching of Improved V-Shaped Microcantilever 856

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dc.contributor.authorGupta, Navneet
dc.date.accessioned2023-02-06T10:22:33Z
dc.date.available2023-02-06T10:22:33Z
dc.date.issued2012
dc.description.abstractIn this paper we have analyzed the sensitivity to over-etching of our recently proposed improved V-Shaped microcantilever. For V-shaped microcantilever, the final length is very sensitive to over-etching because of the sharp corner at the free end of the cantilever. It has been observed that for different values of over-etching the improved V-shape microcantilever tip is more robust compared to the linear counterpart.en_US
dc.identifier.urihttps://www.scientific.net/AMR.403-408.3376
dc.identifier.urihttp://dspace.bits-pilani.ac.in:8080/xmlui/handle/123456789/9003
dc.language.isoenen_US
dc.publisherTrans Tech Publications Ltden_US
dc.subjectEEEen_US
dc.subjectOver-Etchingen_US
dc.subjectMicrocantileveren_US
dc.titleSensitivity to Over-Etching of Improved V-Shaped Microcantilever 856en_US
dc.typeArticleen_US

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