A 8-resistor SU-8 accelerometer with reduced cross axis sensitivity
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Date
2010
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Publisher
IEEE
Abstract
The MEMS accelerometer has a high cross sensitivity due to proof mass being eccentric. This paper gives results for a SU-8 z-axis accelerometer that uses 8-resistor Wheatstone-bridge to reduce the x-axis and y-axis cross sensitivity by 2 orders of magnitude compared to the conventional 4-resistor Wheatstone-bridge arrangement.
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Keywords
EEE, Acceleration, Accelerometers, Bridge circuits, Piezoresistance, Polymers