A 8-resistor SU-8 accelerometer with reduced cross axis sensitivity
| dc.contributor.author | Rao, V. Ramgopal | |
| dc.date.accessioned | 2023-11-02T10:49:11Z | |
| dc.date.available | 2023-11-02T10:49:11Z | |
| dc.date.issued | 2010 | |
| dc.description.abstract | The MEMS accelerometer has a high cross sensitivity due to proof mass being eccentric. This paper gives results for a SU-8 z-axis accelerometer that uses 8-resistor Wheatstone-bridge to reduce the x-axis and y-axis cross sensitivity by 2 orders of magnitude compared to the conventional 4-resistor Wheatstone-bridge arrangement. | en_US |
| dc.identifier.uri | https://ieeexplore.ieee.org/document/5775073 | |
| dc.identifier.uri | http://dspace.bits-pilani.ac.in:8080/xmlui/handle/123456789/12822 | |
| dc.language.iso | en | en_US |
| dc.publisher | IEEE | en_US |
| dc.subject | EEE | en_US |
| dc.subject | Acceleration | en_US |
| dc.subject | Accelerometers | en_US |
| dc.subject | Bridge circuits | en_US |
| dc.subject | Piezoresistance | en_US |
| dc.subject | Polymers | en_US |
| dc.title | A 8-resistor SU-8 accelerometer with reduced cross axis sensitivity | en_US |
| dc.type | Article | en_US |
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