Nano-electro-mechanical transduction and packaging solutions for polymer MEMS devices

Abstract

Polymeric micro/nano electromechanical sensors and devices have recently gained much attention over their Si counterparts because of their lower cost and higher sensitivity. In this paper, we have reviewed various reported schemes for nano-electro- mechanical transduction for polymeric sensors particularly for physical, chemical and bio-sensing applications. We have also reviewed the packaging aspects and challenges for these polymeric sensors for various applications.