Nano-electro-mechanical transduction and packaging solutions for polymer MEMS devices

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dc.contributor.authorRao, V. Ramgopal
dc.date.accessioned2023-11-02T05:41:36Z
dc.date.available2023-11-02T05:41:36Z
dc.date.issued2015
dc.description.abstractPolymeric micro/nano electromechanical sensors and devices have recently gained much attention over their Si counterparts because of their lower cost and higher sensitivity. In this paper, we have reviewed various reported schemes for nano-electro- mechanical transduction for polymeric sensors particularly for physical, chemical and bio-sensing applications. We have also reviewed the packaging aspects and challenges for these polymeric sensors for various applications.en_US
dc.identifier.urihttps://ieeexplore.ieee.org/document/7388668
dc.identifier.urihttp://dspace.bits-pilani.ac.in:8080/xmlui/handle/123456789/12800
dc.language.isoenen_US
dc.publisherIEEEen_US
dc.subjectEEEen_US
dc.subjectMEMSen_US
dc.subjectPolymeren_US
dc.subjectMicro-cantileveren_US
dc.subjectPiezoresistiveen_US
dc.subjectZnO nanowireen_US
dc.subjectCantiFETen_US
dc.subjectPackagingen_US
dc.titleNano-electro-mechanical transduction and packaging solutions for polymer MEMS devicesen_US
dc.typeArticleen_US

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