Department of Electrical and Electronics Engineering
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Item Design and simulation of a resonance-based MEMS viscosity sensor(Springer, 2023-11) Yenuganti, SujanThe paper presents the design and simulation of a MEMS-based resonant viscosity sensor using a piezoelectric micro diaphragm. The sensor comprises a vibrating diaphragm as a resonating element with piezoelectric excitation and detection. As the viscosity of the liquid beneath the diaphragm changes, the resonant frequency also changes. A numerical model of a diaphragm is designed in the COMSOL Multiphysics FEM tool, and its resonance characteristics were studied with a fluid of different viscosities beneath it. To support the numerical simulation results, mesoscale experimentation was also performed using a stainless steel thin sheet as a diaphragm and also to verify the proof of concept of the proposed sensor. The major benefit of the proposed sensor is that it uses the resonance measurement principle and can be shown to offer good stable performance, resolution, reliability, and response time. The proposed sensor can also be showcased as a hand-held laboratory product for quick viscosity measurementsItem A Tri-axial Resonating Beam MEMS Accelerometer(Springer, 2024-07) Yenuganti, SujanMEMS-based devices have helped in the miniaturization of various transducers, one such being the accelerometer. The current study presents the design and simulation of a MEMS tri-axial resonance-based accelerometer in a differential arrangement to measure acceleration up to 5 g. The final tri-axial accelerometer differential design is derived from five designs which consist of four proof masses, four resonating beams, two vertical and two horizontal hinges. The first three designs are non-differential designs and the next two designs give a differential output only for out-of-plane acceleration. Numerical simulations were carried out in COMSOL Multiphysics for all the designs and the dimensions were optimized to obtain maximum stress on the resonating beam for an applied acceleration. Eigenfrequency analysis was also carried out to estimate the change in resonance frequencies of all the resonating beams in each of the proposed models along with the final differential design. The sensitivities were found to be 33 Hz/g, 33 Hz/g, and 19 Hz/g for the final differential design in X, Y, and Z directions respectively. The differential arrangement will be able to compensate for any temperature variations and the resonance condition can be achieved by piezoelectric excitation and detection