Department of Electrical and Electronics Engineering
Permanent URI for this collectionhttp://localhost:4000/handle/123456789/1925
Browse
4 results
Search Results
Item A Tri-axial Resonating Beam MEMS Accelerometer(Springer, 2024-07) Yenuganti, SujanMEMS-based devices have helped in the miniaturization of various transducers, one such being the accelerometer. The current study presents the design and simulation of a MEMS tri-axial resonance-based accelerometer in a differential arrangement to measure acceleration up to 5 g. The final tri-axial accelerometer differential design is derived from five designs which consist of four proof masses, four resonating beams, two vertical and two horizontal hinges. The first three designs are non-differential designs and the next two designs give a differential output only for out-of-plane acceleration. Numerical simulations were carried out in COMSOL Multiphysics for all the designs and the dimensions were optimized to obtain maximum stress on the resonating beam for an applied acceleration. Eigenfrequency analysis was also carried out to estimate the change in resonance frequencies of all the resonating beams in each of the proposed models along with the final differential design. The sensitivities were found to be 33 Hz/g, 33 Hz/g, and 19 Hz/g for the final differential design in X, Y, and Z directions respectively. The differential arrangement will be able to compensate for any temperature variations and the resonance condition can be achieved by piezoelectric excitation and detectionItem Experimental studies on dynamic response of piezoelectric based hemispherical resonator gyroscope(Emerald, 2024-08) Rao, Venkatesh K. P.; Yenuganti, SujanThis work measures the performance characteristics of a hemispherical resonator gyroscope (HRG) and compares it with a numerical model. This work we explore the optical and piezoelectric measurement methods to determine the resonant frequency of HRG. These experimental results are compared with their numerically obtained values. To explore the performance characteristics, the effect of varying actuation voltages on the sense mode displacement and the piezoelectric sensor output was studied in the absence of input angular rate. The structure was then subjected to range of angular rate signals, at a constant actuation voltage and the corresponding sensor response was analysed.Item Design and testing of piezoelectric resonant pressure sensor(Elsevier, 2016-10) Yenuganti, SujanA stainless steel resonant pressure sensor with a new design is proposed with piezoelectric excitation and detection. The sensor consists of a sensing diaphragm, inclined trusses, vertical mounts and a resonating beam. The deflection of the diaphragm is transferred to the resonating beam via specially designed inclined trusses and vertical mounts. The analytical model of the sensor is developed using Ritz method and direct stiffness method for the non uniform sensing diaphragm and resonating beam respectively. The relation between strain due to applied pressure and change in the resonance frequency is derived. The sensor is also modelled numerically using MEMS CAD Tool CoventorWare. The sensor is fabricated with three different grades of stainless steel namely SS 304, SS 431, 15-5 PH, using Electrical Discharge Machining (EDM) and wire cut EDM process. The sensors are tested for its characteristics for an input pressure of 0–25 bar. The sensor fabricated using 15-5 PH is found to have good linearity, repeatability, higher sensitivity and low hysteresis compared to the sensors fabricated with SS 304 and SS 431. The sensor design is simple, fabrication involves well known machining process, self packed and hence cost effective.Item Piezoelectric microresonant pressure sensor using aluminum nitride(SPIE, 2017-04) Yenuganti, SujanThis paper presents the design and fabrication of a silicon island supported resonating beam-based micropressure sensor with piezoelectric excitation and detection. The sensor consists of a silicon frame with silicon islands supporting a silicon nitride (SIN) resonating beam placed diagonally on the island in a square diaphragm made of silicon. Aluminum nitride (AlN) thin films deposited at the extreme ends of the SIN beam is used for resonant actuation and sensing. Customized process steps are followed with seven masks to fabricate the sensor, which is first of its kind in the fabrication of microresonant pressure sensors with AlN as piezoelectric material for sensing and actuating the resonating beam. Basic mechanical and electrical characterization is carried out on the unit devices individually to identify the resonance characteristics of the sensor. The results obtained from numerical simulations and experimentation are in close agreement and in the same dimensional range. Closed loop electronics are also designed and tested to vibrate the resonating beam of the unit device at its resonant frequency under no pressure load conditions, which is found to be close to the measured resonance frequency from the mechanical characterization.