Department of Electrical and Electronics Engineering
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Item Neutral electron trap generation under irradiation in reoxidized nitrided gate dielectrics(IEEE, 1996-09) Rao, V. RamgopalIn this study we report for the first time results on neutral electron trap generation in reoxidised nitrided oxide dielectrics under various radiation doses and bias conditions and compare the results with the conventional oxides. We see very little electron trap creation in RNO dielectrics for radiation doses up to 5 Mrad (Si) and for bias fields up to /spl plusmn/2.5 MV/cm. We explain our results in RNO and oxide dielectrics using a three step defect creation model.Item High-field stressing of LPCVD gate oxides(IEEE, 1997-03) Rao, V. RamgopalWe have investigated gate oxide degradation as a function of high-field constant current stress for two types of oxides, viz. standard dry and LPCVD oxides. Charge injection was done from both electrodes, the gate and the substrate. Our results indicate that compared to dry oxides, LPCVD oxides show reduced charge trapping and interface state generation for inversion stress. The degradation in LPCVD oxides with constant current stress has been explained by the hydrogen model.Item Highly Repeatable Low-ppm Ethanol Sensing Characteristics of p-TiO2-Based Resistive Devices(IEEE, 2015-01) Hazra, ArnabIn this paper, we report on the development of a highly sensitive, relatively low-temperature ethanol sensor based on sol-gel derived p-TiO 2 thin film. The p-type anatase TiO 2 thin film was deposited by sol-gel technique on a thermally oxidized <;100> p-Si (resistivity 5 Ω cm) substrate. Anatase TiO 2 phase with <;101> nanocrystallinity was confirmed with an average particle size of ~11 nm from X-ray diffraction and field emission scanning electron microscopic study. Ethanol sensor study, in the resistive mode, was carried out at a relatively low operating temperature range (75 °C-175 °C) for sensing low concentrations of ethanol in air (5-100 ppm). Response magnitude of ~146% was observed at 150 °C toward 100-ppm ethanol (in air) with corresponding response time and recovery time of 39 and 15 s, respectively. The sensor showed appreciably high-response magnitude (129%) even at low ethanol concentration (5 ppm) with acceptable response and recovery time (54 and 22 s, respectively) at the same operating temperature (150 °C). At a particular temperature, for all the ethanol concentrations, sensor showed minimal base line resistance drift, thereby offering highly repeatable and stable sensing performance. Ethanol selectivity study against other volatile organic compounds, such as methanol, acetone, and 2-butanone, was also investigated and was found to be quite promising. Ethanol sensing mechanism for such p-type TiO 2 has also been discussed in the light of corresponding oxygen vacancy model.